Transfers of 2-inch GaN films onto sapphire substrates...

Transfers of 2-inch GaN films onto sapphire substrates using Smart CutTM technology

Tauzin, A., Akatsu, T., Rabarot, M., Dechamp, J., Zussy, M., Moriceau, H., Michaud, J.F., Charvet, A.M., Di Cioccio, L., Fournel, F., Garrione, J., Faure, B., Letertre, F., Kernevez, N.
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Volume:
41
Year:
2005
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:20051038
File:
PDF, 864 KB
english, 2005
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