In situ etching-back processes for a sharper top interface...

Diamond and Related Materials 2012 / 4 Vol. 24

In situ etching-back processes for a sharper top interface in boron delta-doped diamond structures

Fiori, Alexandre, Tran Thi, Thu Nhi, Chicot, Gauthier, Jomard, François, Omnès, Franck, Gheeraert, Etienne, Bustarret, Etienne
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Volume:
24
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2012.01.018
Date:
April, 2012
File:
PDF, 505 KB
english, 2012
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