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A Bidirectional Two-Axis Electrostatic MEMS Positioning System
Sivakumar, Ganapathy, Matthews, James, Subhani, Mahmood, Dallas, TimVolume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2047094
Date:
June, 2010
File:
PDF, 825 KB
english, 2010