SixCy Thin Films Deposited at Low Temperature by DC Dual...

Materials Science Forum 2012 / 5 Vol. 717-720

SixCy Thin Films Deposited at Low Temperature by DC Dual Magnetron Sputtering: Effect of Power Supplied to Si and C Cathode Targets on Film Physicochemical Properties

Medeiros, Henrique S., Pessoa, Rodrigo S., Sagás, Júlio C., Fraga, Mariana A., Santos, Lúcia V., Maciel, Homero S., Massi, Marcos, da Silva Sobrinho, A.S.
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Volume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.717-720.197
Date:
May, 2012
File:
PDF, 479 KB
english, 2012
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