Selective growth of carbon nanotubes on silicon protrusions

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2005 Vol. 23; Iss. 2

Selective growth of carbon nanotubes on silicon protrusions

Sato, Hideki, Hata, Koichi, Miyake, Hideto, Hiramatsu, Kazumasa, Saito, Yahachi
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1885008
File:
PDF, 602 KB
english, 2005
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