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Raman Scattering Spectroscopy of Residual Stresses in Epitaxial AlN Films
Yang, Shibo, Miyagawa, Reina, Miyake, Hideto, Hiramatsu, Kazumasa, Harima, HiroshiVolume:
4
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/apex.4.031001
Date:
February, 2011
File:
PDF, 1.28 MB
english, 2011