Slender piezoelectric cantilevers of high quality AlN...

Sensors and Actuators A: Physical 2013 / 11 Vol. 202

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Tran, A.T., Wunnicke, O., Pandraud, G., Nguyen, M.D., Schellevis, H., Sarro, P.M.
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Volume:
202
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.01.047
Date:
November, 2013
File:
PDF, 1.42 MB
english, 2013
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