Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 2
Planar-localized surface plasmon resonance device by block-copolymer and nanoimprint lithography fabrication methods
Peter Yang, C. Y., Yang, Elaine L., Steinhaus, Chip A., Liu, Chi-Chun, Nealey, Paul F., Skinner, Jack L.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3683475
File:
PDF, 1011 KB
english, 2012