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Oxidation behaviour of silicon nitride under cyclic and static conditions
Minoru Maeda, Kazuo Nakamura, Tsutomu Ohkubo, Masaru Ito, Eiichi IshiiVolume:
15
Year:
1989
Language:
english
Pages:
7
DOI:
10.1016/0272-8842(89)90044-8
File:
PDF, 991 KB
english, 1989