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Deposition and characterization of CVD-tungsten and tungsten carbonitrides on (100) Si
K.A. Gesheva, E.S. Vlakhov, G.I. Stoyanov, G.D. Beshkov, M. MarinovVolume:
22
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0272-8842(95)00060-7
File:
PDF, 313 KB
english, 1996