A comparative study on microstructure and tribological properties of Si3N4 and TiN thin films produced by IBED method
Zhuang Da-Ming, Liu Jia-Jun, Zhu-Bao-Liang, Li Wen-Zhi, Zhang Xu-Shou, Yang Sheng-RongVolume:
21
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0272-8842(95)94470-u
File:
PDF, 544 KB
english, 1995