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[IEEE 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA) - Kuala Lumpur, Malaysia (2013.11.25-2013.11.27)] 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA) - Structural properties of nanorod zinc oxide thin films on Si substrate deposited by RF magnetron sputtering at room temperature
Shafura, A. K., Sin, N. D. Md, Mamat, M. H., Uzer, M, Mohamad, A., Rusop, M.Year:
2013
Language:
english
DOI:
10.1109/icsima.2013.6717947
File:
PDF, 521 KB
english, 2013