[IEEE 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA) - Kuala Lumpur, Malaysia (2013.11.25-2013.11.27)] 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA) - Structural properties of nanorod zinc oxide thin films on Si substrate deposited by RF magnetron sputtering at room temperature

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