XPS and Spectroscopic Ellipsometry Study of Composite...

Advanced Materials Research 2013 / 6 Vol. 712-715

XPS and Spectroscopic Ellipsometry Study of Composite SiNx/DLC Prepared by Co-Deposition of RF Magnetron and Filtered Cathodic Arc

Bunnak, Phuwanai, Gong, Yong Ping, Limsuwan, Supanee, Pokaipisit, Artorn, Limsuwan, Pichet
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Volume:
712-715
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.712-715.601
Date:
June, 2013
File:
PDF, 343 KB
english, 2013
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