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Thermal properties of thin Al2O3 films and their barrier layer effect on thermo-optic properties of TiO2 films grown by atomic layer deposition
Saleem, Muhammad Rizwan, Ali, Rizwan, Honkanen, Seppo, Turunen, JariVolume:
542
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.06.030
Date:
September, 2013
File:
PDF, 597 KB
english, 2013