Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1999 Vol. 17; Iss. 6
![](/img/cover-not-exists.png)
Charging and discharging of electron beam resist films
Bai, M., Pease, R. F. W., Tanasa, C., McCord, M. A., Pickard, D. S., Meisburger, D.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591091
File:
PDF, 327 KB
english, 1999