Charging and discharging of electron beam resist films

Bai, M., Pease, R. F. W., Tanasa, C., McCord, M. A., Pickard, D. S., Meisburger, D.

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Volume:

Year:

1999

Language:

english

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

DOI:

10.1116/1.591091

File:

PDF, 327 KB

english, 1999

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