A liquid-filled microrelay with a moving mercury microdrop

Journal of Microelectromechanical Systems 1997 / Sept. Vol. 6; Iss. 3

A liquid-filled microrelay with a moving mercury microdrop

Simon, J., Saffer, S., Kim, C.-J.
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Volume:
6
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.623109
Date:
January, 1997
File:
PDF, 195 KB
english, 1997
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