Silicon resonant angular rate sensor using electromagnetic...

Journal of Micromechanics and Microengineering 1995 / 09 Vol. 5; Iss. 3

Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection

Hashimoto, M, Cabuz, C, Minami, K, Esashi, M
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Volume:
5
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/5/3/003
Date:
September, 1995
File:
PDF, 472 KB
english, 1995
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