![](/img/cover-not-exists.png)
Suppressed Si precipitation at an AlSi/Si contact by the presence of thin SiO 2 film on the Si substrate
Nogami, T, Takahashi, S, Oami, M, Kaneko, Y, Haida, OVolume:
9
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/9/11/018
Date:
November, 1994
File:
PDF, 968 KB
english, 1994