[IEEE 2014 14th International Workshop on Junction Technology (IWJT) - Shanghai, China (2014.5.18-2014.5.20)] 2014 International Workshop on Junction Technology (IWJT) - Ion implantation technology in SiC for power device applications
Kimoto, Tsunenobu, Kawahara, Koutaro, Niwa, Hiroki, Kaji, Naoki, Suda, JunYear:
2014
Language:
english
DOI:
10.1109/IWJT.2014.6842018
File:
PDF, 338 KB
english, 2014