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Development of a proximity sensor with vertically monolithic integrated inductive and capacitive sensing units
Lo, Pei-Hsuan, Tseng, Shih-Hsiung, Yeh, Jen-Hao, Fang, WeileunVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/3/035013
Date:
March, 2013
File:
PDF, 1.55 MB
english, 2013