Experimental Study on Hot Embossing of Micro/Nano Grating

Experimental Study on Hot Embossing of Micro/Nano Grating

Liang, Yong, Liu, Chong, Sun, Huan Li, Li, Jing Min, Liu, Jun Shan, Gao, Xian Ni
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Volume:
60-61
Year:
2009
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.60-61.450
File:
PDF, 644 KB
english, 2009
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