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[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - High-frequency surface acoustic wave (SAW) devices fabricated by contact-transferred and mask-embedded lithography
Chin-Hsin Liu,, Cheng-Yu Chiu,, Yung-Chun Lee,, Shuo Hung Chang,Year:
2008
Language:
english
DOI:
10.1109/NEMS.2008.4484359
File:
PDF, 520 KB
english, 2008