A Piezoelectric Quartz Microactuator for a Large Pseudo-Static Displacement
Toshiyoshi, Hiroshi, Kobayashi, Dai, Fujita, Hiroyuki, Ueda, ToshitsuguVolume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1806
Date:
December, 1994
File:
PDF, 785 KB
1994