A Piezoelectric Quartz Microactuator for a Large...

A Piezoelectric Quartz Microactuator for a Large Pseudo-Static Displacement

Toshiyoshi, Hiroshi, Kobayashi, Dai, Fujita, Hiroyuki, Ueda, Toshitsugu
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1806
Date:
December, 1994
File:
PDF, 785 KB
1994
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