[IEEE 2009 Proceedings of the European Solid State Device Research Conference (ESSDERC) - Athens, Greece (2009.09.14-2009.09.18)] 2009 Proceedings of the European Solid State Device Research Conference - A self-aligned silicidation technology for surround-gate vertical MOSFETS
Hakim, M. M. A., Mallik, K., de-Groot, C. H., Redman.-White, W., Ashburn, P., Tan, L., Hall, S.Year:
2009
Language:
english
DOI:
10.1109/ESSDERC.2009.5331579
File:
PDF, 1.42 MB
english, 2009