[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Enhanced perfomance of sensor/actuator integrated piezoelectric microcantilever by using tetragonal compositon PZT thin films
Kobayash, T., Makimoto, N., Funakubo, H., Oikawa, T., Wada, A., Itoh, T., Maeda, R.Year:
2013
Language:
english
DOI:
10.1109/Transducers.2013.6627158
File:
PDF, 1.59 MB
english, 2013