Investigation of structural, optical and electrical properties of (Ti,Nb)Ox thin films deposited by high energy reactive magnetron sputtering
Mazur, Michal, Kaczmarek, Danuta, Prociow, Eugeniusz, Domaradzki, Jaroslaw, Wojcieszak, Damian, Bocheński, JakubVolume:
32
Language:
english
Journal:
Materials Science-Poland
DOI:
10.2478/s13536-013-0195-4
Date:
September, 2014
File:
PDF, 2.66 MB
english, 2014