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Direct metal contact printing lithography for patterning sub-micrometer surface structures on a sapphire substrate
Hsieh, Yi-Ta, Lee, Yung-ChunVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/1/015001
Date:
January, 2011
File:
PDF, 1.34 MB
english, 2011