Structural design and experimental characterization of...

Structural design and experimental characterization of torsional micromachined gyroscopes with non-resonant drive mode

Acar, Cenk, Shkel, Andrei M
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Volume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/1/303
Date:
January, 2004
File:
PDF, 1005 KB
english, 2004
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