Resonant Body Transistors in IBM's 32 nm SOI CMOS Technology
Marathe, Radhika, Bahr, Bichoy, Wang, Wentao, Mahmood, Zohaib, Daniel, Luca, Weinstein, DanaVolume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2283720
Date:
June, 2014
File:
PDF, 1.96 MB
english, 2014