Physical and Electrical Properties of Yttrium Oxide Gate Dielectrics on Si Substrate with NH[sub 3] Plasma Treatment
Pan, Tung-Ming, Lee, Jian-DerVolume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2742808
File:
PDF, 1.13 MB
english, 2007