Fabrication and testing of the planar magnetic micromotor

Journal of Micromechanics and Microengineering 1991 / 09 Vol. 1; Iss. 3

Fabrication and testing of the planar magnetic micromotor

Guckel, H, Skrobis, K J, Christenson, T R, Klein, J, Han, S, Choi, B, Lovell, E G, Chapman, T W
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Volume:
1
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/1/3/001
Date:
September, 1991
File:
PDF, 485 KB
english, 1991
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