Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test
Leseman, Zayd C., Carlson, Steven P., Mackin, Thomas J.Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2006.883570
Date:
February, 2007
File:
PDF, 1.11 MB
english, 2007