Fabricating microfluidic valve master molds in SU-8...

Journal of Micromechanics and Microengineering 2014 / 05 Vol. 24; Iss. 5

Fabricating microfluidic valve master molds in SU-8 photoresist

Dy, Aaron J, Cosmanescu, Alin, Sluka, James, Glazier, James A, Stupack, Dwayne, Amarie, Dragos
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/5/057001
Date:
May, 2014
File:
PDF, 923 KB
english, 2014
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