Spectroellipsometric characterisation of thin epitaxial Si 1–x Ge x layers
Líbezný, M., Caymax, M., Brablec, A., Kuběna, J., Holý, V., Poortmans, J., Nijs, J., Vanhellemont, J.Volume:
11
Language:
english
Journal:
Materials Science and Technology
DOI:
10.1179/mst.1995.11.10.1065
Date:
October, 1995
File:
PDF, 407 KB
english, 1995