[IEEE 2011 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Kota Kinabalu, Sabah, Malaysia (2011.09.28-2011.09.30)] 2011 IEEE Regional Symposium on Micro and Nano Electronics - Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing
Mirza, Asif, Khir, Mohd Haris Md, Dennis, John Ojur, Ashraf, Khalid, Hamid, Nor HishamYear:
2011
Language:
english
DOI:
10.1109/RSM.2011.6088353
File:
PDF, 416 KB
english, 2011