Fibre-top cantilevers: design, fabrication and applications

Measurement Science and Technology 2007 / 10 Vol. 18; Iss. 10

Fibre-top cantilevers: design, fabrication and applications

Iannuzzi, D, Heeck, K, Slaman, M, de Man, S, Rector, J H, Schreuders, H, Berenschot, J W, Gadgil, V J, Sanders, R G P, Elwenspoek, M C, Deladi, S
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Volume:
18
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/18/10/S30
Date:
October, 2007
File:
PDF, 442 KB
english, 2007
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