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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Contactless RF MEMS switch using PZT actuation
Giffney, Tim, Yu, Miao, Aw, K.C., Zhang, HaixiaYear:
2013
Language:
english
DOI:
10.1109/NEMS.2013.6559860
File:
PDF, 204 KB
english, 2013