High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators
Sansa, Marc, Fernández-Regúlez, Marta, Llobet, Jordi, San Paulo, Álvaro, Pérez-Murano, FrancescVolume:
5
Language:
english
Journal:
Nature Communications
DOI:
10.1038/ncomms5313
Date:
July, 2014
File:
PDF, 1.81 MB
english, 2014