Metal-Assisted Chemical Etching Using Silica Nanoparticle...

Japanese Journal of Applied Physics 2012 / 2 Vol. 51; Iss. 2

Metal-Assisted Chemical Etching Using Silica Nanoparticle for the Fabrication of a Silicon Nanowire Array

Kato, Shinya, Watanabe, Yuya, Kurokawa, Yasuyoshi, Yamada, Akira, Ohta, Yoshimi, Niwa, Yusuke, Hirota, Masaki
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.02BP09
Date:
February, 2012
File:
PDF, 811 KB
english, 2012
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