Sub-10-nm Nanochannels by Self-Sealing and Self-Limiting...

Nano Letters 2010 / 09 Vol. 10; Iss. 9

Sub-10-nm Nanochannels by Self-Sealing and Self-Limiting Atomic Layer Deposition

Nam, Sung-Wook, Lee, Min-Hyun, Lee, Seung-Hyun, Lee, Do-Joong, Rossnagel, S. M., Kim, Ki-Bum
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Volume:
10
Language:
english
Journal:
Nano Letters
DOI:
10.1021/nl100999e
Date:
September, 2010
File:
PDF, 4.64 MB
english, 2010
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