The influence of perforation on electrostatic and damping forces in thick SOI MEMS structures
Ya'akobovitz, Assaf, Krylov, SlavaVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115006
Date:
November, 2012
File:
PDF, 1.85 MB
english, 2012