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Scanning tunneling microscopy-based in situ measurement of fast tool servo-assisted diamond turning micro-structures
Ju, Bing-Feng, Zhu, Wu-Le, Yang, Shunyao, Yang, KejiVolume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/5/055004
Date:
May, 2014
File:
PDF, 3.36 MB
english, 2014