Synthesis and Surface Acoustic Wave Properties of AlN Thin...

Japanese Journal of Applied Physics 1997 / 5 Vol. 36; Iss. Part 1, No

Synthesis and Surface Acoustic Wave Properties of AlN Thin Films Fabricated on (001) and (110) Sapphire Substrates Using Chemical Vapor Deposition of A l C l 3 – N H 3 System

Kaya, Kiyoshi, Takahashi, Hiroshi, Shibata, Yoshihiko, Kanno, Yasuhito, Hirai, Toshio
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.2837
Date:
May, 1997
File:
PDF, 1019 KB
1997
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