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[IEEE 2012 24th International Conference on Microelectronics (ICM) - Algiers, Algeria (2012.12.16-2012.12.20)] 2012 24th International Conference on Microelectronics (ICM) - Characterization by SEM and FTIR of B-LPCVD polysilicon films after thermal oxidation
Bouzerdoum, Moufida, Birouk, BoubekeurYear:
2012
Language:
english
DOI:
10.1109/ICM.2012.6471438
File:
PDF, 636 KB
english, 2012