Capillary self-alignment of mesoscopic foil components for sensor-systems-in-foil
Arutinov, Gari, Smits, Edsger C P, Mastrangeli, Massimo, van Heck, Gert, van den Brand, Jeroen, Schoo, Herman F M, Dietzel, AndreasVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115022
Date:
November, 2012
File:
PDF, 1.30 MB
english, 2012