[IEEE 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Daerah Langkawi, Malaysia (2013.09.25-2013.09.27)] RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics - Humidity sensor based on SnO2 nanoparticle thin film synthesized by thermal chemical vapor deposition (CVD)

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