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Linear-Stiffness Rotary MEMS Stage
Baran, Utku, Davis, Wyatt O., Holmstrom, Sven, Brown, Dean, Sharma, Jaibir, Gokce, Sertan Kutal, Urey, HakanVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2182504
Date:
June, 2012
File:
PDF, 243 KB
english, 2012