Microfabricated Lamb wave device based on PZT sol-gel thin...

Journal of Microelectromechanical Systems 1997 / Dec. Vol. 6; Iss. 4

Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Luginbuhl, P., Collins, S.D., Racine, G.-A., Gretillat, M.-A., De Rooij, N.F., Brooks, K.G., Setter, N.
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Volume:
6
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.650131
Date:
January, 1997
File:
PDF, 380 KB
english, 1997
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