Very low gas flow measurements for UHV/XHV and leak calibration
Detian, Li, Yongjun, Cheng, Yan, Feng, Zhenhua, Xi, Lan, ZhaoVolume:
50
Language:
english
Journal:
Metrologia
DOI:
10.1088/0026-1394/50/1/15
Date:
February, 2013
File:
PDF, 169 KB
english, 2013