Optimization and Structural Characterization of W/Al...

Chemistry of Materials 2005 / 06 Vol. 17; Iss. 13

Optimization and Structural Characterization of W/Al 2 O 3 Nanolaminates Grown Using Atomic Layer Deposition Techniques

Sechrist, Z. A., Fabreguette, F. H., Heintz, O., Phung, T. M., Johnson, D. C., George, S. M.
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Volume:
17
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm050470y
Date:
June, 2005
File:
PDF, 440 KB
english, 2005
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